Plasma etching: An Introduction (Record no. 24703)

MARC details
000 -LEADER
fixed length control field 00560pam a2200217 a 4500
001 - CONTROL NUMBER
control field 1951437
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20201017123456.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 880105s1989 flua b 001 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 87037419
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780124693708
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency DLC
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.044 MAN
Edition number 19
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Manos, Dennis M
245 00 - TITLE STATEMENT
Title Plasma etching: An Introduction
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Boston:
Name of publisher, distributor, etc Academic Press,
Date of publication, distribution, etc 1989.
300 ## - PHYSICAL DESCRIPTION
Extent 476p.
440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE
Title Plasma Materials Interactions
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Plasma Etching.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Flamm, Daniel L.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book

No items available.