Physics of Micro/Nano-Fabrication (Record no. 31657)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00305nam a22001337a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9788184894134 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Brodie, Ivor |
| 245 ## - TITLE STATEMENT | |
| Title | Physics of Micro/Nano-Fabrication |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York |
| Name of publisher, distributor, etc | Plenum Press |
| Date of publication, distribution, etc | 1992 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 650 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Muray, Julius J |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Reference Book |
No items available.
