Introduction to Microfabrication Sami Franssila.

By: Franssila, SamiMaterial type: TextTextPublication details: Chichester, West Sussex [England] : John Wiley & Sons, 2010Edition: 2nd edDescription: xiv, 518 p. : ill. ; 26 cmISBN: 9780470749838Subject(s): Microelectromechanical systems | Electronic apparatus and appliances | MicrofabricationDDC classification: 621.381 FRA LOC classification: TK7875 | .F73 2010Online resources: Contributor biographical information | Publisher description | Table of contents only
List(s) this item appears in: Electronics and Communication Engineering Books
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Item type Current library Collection Call number Status Date due Barcode Item holds
Reference Book Reference Book Alliance College of Engineering and Design
General Stacks 		Electronics and Communication Engineering 621.381 FRA (Browse shelf (Opens below)) Not for loan E07401
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Includes bibliographical references and index.

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