TY  - BOOK
AU  - Manos, Dennis M
AU  - Flamm,Daniel L.
TI  - Plasma etching: An Introduction 
SN  - 9780124693708
U1  - 621.044 MAN 19
PY  - 1989///
CY  - Boston
PB  - Academic Press
KW  - Plasma Etching
ER  -