TY  - GEN
AU  - Campbell, Stephen A
TI  - Fabrication Engineering at the Micro- and Nanoscale
SN  - 9780199861224
U1  - 621.38152 CAM 
PY  - 2013///
CY  - New York
PB  - Oxford University Press
KW  - Semiconductors-Design and Construction
N2  - Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes
ER  -