| 000 | 00560pam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | 1951437 | ||
| 005 | 20201017123456.0 | ||
| 008 | 880105s1989 flua b 001 0 eng | ||
| 010 | _a 87037419 | ||
| 020 | _a9780124693708 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 082 | 0 | 0 |
_a621.044 MAN _219 |
| 100 | _aManos, Dennis M | ||
| 245 | 0 | 0 | _aPlasma etching: An Introduction |
| 260 |
_aBoston: _bAcademic Press, _c1989. |
||
| 300 | _a476p. | ||
| 440 | 0 | _aPlasma Materials Interactions | |
| 650 | 0 | _aPlasma Etching. | |
| 700 | 1 | _aFlamm, Daniel L. | |
| 942 | _cBK | ||
| 999 |
_c24703 _d24703 |
||