000
00305nam a22001337a 4500
020
_a
9788184894134
082
_a
621.3815
100
_a
Brodie, Ivor
245
_a
Physics of Micro/Nano-Fabrication
260
_a
New York
_b
Plenum Press
_c
1992
300
_a
650
700
_a
Muray, Julius J
942
_c
RB
999
_c
31657
_d
31657