000 00305nam a22001337a 4500
020 _a9788184894134
082 _a621.3815
100 _aBrodie, Ivor
245 _aPhysics of Micro/Nano-Fabrication
260 _aNew York
_bPlenum Press
_c1992
300 _a650
700 _aMuray, Julius J
942 _cRB
999 _c31657
_d31657