Fabrication Engineering at the Micro- and Nanoscale
Campbell, Stephen A
Fabrication Engineering at the Micro- and Nanoscale - 4 - New York Oxford University Press 2013 - 671
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
9780199861224
Semiconductors-Design and Construction.
621.38152 CAM
Fabrication Engineering at the Micro- and Nanoscale - 4 - New York Oxford University Press 2013 - 671
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
9780199861224
Semiconductors-Design and Construction.
621.38152 CAM
