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Fabrication Engineering at the Micro- and Nanoscale

By: Publication details: New York: Oxford University Press, 2013Edition: 4Description: 671ISBN:
  • 9780199861224
Subject(s): DDC classification:
  • 621.38152 CAM
Summary: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
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Holdings
Item type Current library Collection Call number Status Date due Barcode Item holds
Reference Book Reference Book Alliance College of Engineering and Design Mechanical Engineering 621.38152 CAM (Browse shelf(Opens below)) Not for loan E14929
Reference Book Reference Book Alliance College of Engineering and Design Mechanical Engineering 621.38152 CAM (Browse shelf(Opens below)) Not for loan E14928
Total holds: 0

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

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