Fabrication Engineering at the Micro- and Nanoscale (Record no. 48131)

MARC details
000 -LEADER
fixed length control field 00854 a2200157 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780199861224
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152 CAM
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Campbell, Stephen A
245 ## - TITLE STATEMENT
Title Fabrication Engineering at the Micro- and Nanoscale
250 ## - EDITION STATEMENT
Edition statement 4
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Name of publisher, distributor, etc Oxford University Press
Date of publication, distribution, etc 2013
Place of publication, distribution, etc New York
300 ## - PHYSICAL DESCRIPTION
Extent 671
520 ## - SUMMARY, ETC.
Summary, etc Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.<br/><br/>With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductors-Design and Construction.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Source of classification or shelving scheme Dewey Decimal Classification

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