Fabrication Engineering at the Micro- and Nanoscale

By:

Campbell, Stephen A

Publication details: New York: Oxford University Press, 2013Edition: 4Description: 671ISBN:

9780199861224

Subject(s):

Semiconductors-Design and Construction

DDC classification:

621.38152 CAM

Summary: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
Reference Book	Alliance College of Engineering and Design	Mechanical Engineering	621.38152 CAM (Browse shelf(Opens below))	Not for loan		E14929
Reference Book	Alliance College of Engineering and Design	Mechanical Engineering	621.38152 CAM (Browse shelf(Opens below))	Not for loan		E14928

Total holds: 0

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Previous	621.1 TRI GATE (Graduate Aptitude Test in Engineering) : Mechanical Engineering	621.31042 RAG Design of Machine Elements: I	621.31042 RAG Design of Machine Elements II	621.38152 CAM Fabrication Engineering at the Micro- and Nanoscale	621.38152 CAM Fabrication Engineering at the Micro- and Nanoscale	621.4 ARO Power Plant Engineering	621.4 ARO Power Plant Engineering	Next

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

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